AS ISO 14644.3 pdf download

AS ISO 14644.3 pdf download.Cleanrooms and associated controlled environments
1  Scope
This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational. The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices. NOTE  This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.
3  Terms and definitions
For the purposes of this document, the following terms and definitions apply. ISO and IEC maintain terminological databases for use in standardization at the following addresses: — ISO Online browsing platform: available at https:// www .org/ obp — IEC Electropedia: available at http:// www .electropedia .org/ 3.1  General terms 3.1.1 cleanroom room within which the number concentration of airborne particles (3.2.1) is controlled and classified, and which is designed, constructed and operated in a manner to control the introduction, generation and retention of particles inside the room Note 1 to entry: The class of airborne particle concentration (3.2.4) is specified. Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be specified and controlled. Note 3 to entry: Other relevant physical parameters might also be controlled as required, e.g. temperature, humidity, pressure, vibration and electrostatic. [SOURCE: ISO 14644-1:2015, 3.1.1] 3.1.2 clean zone defined space within which the number concentration of airborne particles (3.2.1) is controlled and classified, and which is constructed and operated in a manner to control the introduction, generation and retention of contaminants inside the space Note 1 to entry: The class of airborne particle concentration (3.2.4) is specified. Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be specified and controlled. Note 3 to entry: A clean zone(s) can be a defined space within a cleanroom (3.1.1) or might be achieved by a separative device. Such a device can be located inside or outside a cleanroom. Note 4 to entry: Other relevant physical parameters might also be controlled as required, e.g. temperature, humidity, pressure, vibration and electrostatic. [SOURCE: ISO 14644-1:2015, 3.1.2] 3.1.3 installation cleanroom (3.1.1) or one or more clean zones (3.1.2), together with all associated structures, air- treatment systems, services and utilities [SOURCE: ISO 14644-1:2015, 3.1.3] 3.1.4 separative device equipment utilizing constructional and dynamic means to create assured levels of separation between the inside and outside of a defined volume Note 1 to entry: Some industry-specific examples of separative devices are clean air hoods, containment enclosures, glove boxes, isolators and mini-environments. [SOURCE: ISO 14644-7:2004, 3.17] 3.1.5 resolution smallest change in a quantity being measured that causes a perceptible change in the corresponding indication Note 1 to entry: Resolution can depend on, for example, noise (internal or external) or friction.